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Gift to College of Engineering Will Support Nanoscale Research

Gift to College of Engineering Will Support Nanoscale Research

(January 9, 2002)

The Marlan and Rosemary College of Engineering at the University of California, Riverside has been given high-tech equipment, valued at $257,000, by Conexant Systems, Inc., of Newport Beach, California.

The equipment will be used to support research in the Center for Nanoscale Science and Engineering (CNSE) at UCR, and specifically in the conventional microfabrication of devices and microelectromechanical systems in a clean room environment.

Mihri Ozkan, assistant professor of Electrical Engineering and Chemical and Environmental Engineering, and Cengiz Ozkan, assistant professor of Mechanical Engineering, were instrumental in securing the gift for the university.

'We have been looking for equipment donations for our nanotechnology development efforts at UCR for the last few months,' Cengiz Ozkan said. 'This donated equipment will aid us enormously in building a micro/nano fabrication facility in the College of Engineering.”

Nanotechnology is poised to yield revolutionary material systems, new fabrication procedures, electronic devices and biomechanical systems built at the nanoscale, having structures with dimensions on the order of a nanometer to a few hundred nanometers. (A nanometer is a billionth of a meter, more than 1,000 times narrower than the width of a human hair.)

The donation is the first that Conexant, a worldwide supplier of semiconductor solutions for the Personal Networking market, has offered to CNSE. 'The equipment will be utilized by UCR researchers in nanotechnology, who come from various departments and disciplines,” Mihri Ozkan said.

An inspection system, an aligner system, a plasma etching system and metrology tools are just some of the equipment that CNSE will receive. “For some time, we have been talking to Conexant for such a donation, and, in particular, with Yusuf Cetin, a member of their technical staff, and Scott Collier, Property Account at Conexant,” the Ozkans said. “They both made this donation possible.”

The Ozkans are optimistic that Conexant will make future donations to the university. 'The equipment we are donating to UCR is from a process that we no longer use,' said Conexant's Scott Collier. 'We donate equipment to several academic institutions from time to time, and UCR will most certainly be on Conexant's list for future donations.'

The gifted equipment is expected to arrive at UCR this month.

The University of California, Riverside ( is a doctoral research university, a living laboratory for groundbreaking exploration of issues critical to Inland Southern California, the state and communities around the world. Reflecting California's diverse culture, UCR's enrollment has exceeded 21,000 students. The campus opened a medical school in 2013 and has reached the heart of the Coachella Valley by way of the UCR Palm Desert Center. The campus has an annual statewide economic impact of more than $1 billion.

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